An Investigation on the Electrical Properties of SBT Capacitors Prepared by Radio-frequency Sputtering Method
碩士 === 國立清華大學 === 電子工程研究所 === 87 === In this work the capacitance-voltage (C-V), current-voltage (I-V) characteristics of metal-insulator-metal (MIM) and metal-ferroelectric-insulator-semiconductor (MFIS) capacitors were measured. The SBT films were successfully prepared on Pt/Ti/silicon...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89247861219942353215 |