Interfacial Reaction of Titanium and Copper Thin Films on Si-Ge Alloys on Silicon and Germanium
博士 === 國立清華大學 === 材料科學工程學系 === 87 === Abstract Interfacial reactions of Ti and Cu thin films on Si-Ge Alloys on Silicon and Germanium have been studied by cross-sectional and planview transmission electron microscopy, Auger electron spectrometer, sheet resistance and X-ray diffractom...
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61388908369888867412 |