Finding bottom electrodes for Ta2O5 thin film capacitor
碩士 === 國立清華大學 === 材料科學工程學系 === 87 === using W(N)、TiW(N)、Ru、RuTi、RuTa as bottom electrodes,do RTO or RTN 60sec. then do somthing
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38731919809138941292 |