Study on the field emission properties of nitrogen doped diamond films prepared by microwave plasma enhanced CVD
碩士 === 國立清華大學 === 材料科學工程學系 === 87 === In this paper,we use MPECVD to deposit diamond films on silicon and gold substrate,mixed with methane, hydrogen and urea.We use SEM, four point probes, Raman, FTIR, field emission J-E measurement to realize the thin film properties and try to find ou...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60581946929114321378 |