Constructing a FMEA Framework for Improving the Manufacturing Processes in Semiconductor Industry and its Illustrations
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 87 === This study integrated Failure Mode Effect and Criticality Analysis, Fault Tree, and Event Tree methods to develop a research framework for improving process technology in semiconductor industry. We specified the steps of the required data for the implementati...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1999
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Online Access: | http://ndltd.ncl.edu.tw/handle/88612562260649942745 |