Petri Nets-based Integrated Failure Analysis Controlling System
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 87 === The semiconductor manufacturing involves extremely complex processes and high cost. Any error occurred in the process may induce serious damage to the enterprise. Therefore, how to improve the yield is the goal that each semiconductor factory is engaged to...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78636880006276322612 |