Sensitivity Search of the Photo Area Real-Time Scheduling for Semiconductor Wafer Fabrication
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 87 === This research deals with the real time scheduling problem in the photolithography area of semiconductor wafer fabrications. The objective is to find an optimal schedule that minimizes the weighted function of makespan, maximum tardiness, and setup frequency....
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17585238358955062424 |