Low Temperature Growth of GaN Films Using Magnetron Sputtering
碩士 === 國立中山大學 === 物理學系 === 87 === In this thesis the polycrystalline gallium nitride ( GaN ) films were achieved by magnetron rf sputtering. The X-ray diffraction ( XRD ), scanning electron microscope ( SEM ), electron probe microscope analysis ( EPMA ) and photoluminescence measurement...
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| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04656100687153929062 |