The fabrication and analysis of GaN light emitting diode

The fabrication and analysis of GaN light emitting diode

碩士 === 國立中央大學 === 光電科學研究所 === 87 === In this paper, we fabricate GaN LED by using ECR etching technology.And after ECR etching process, we use RTA (Rapid thermal annealing) to recover the lattice quality which is damaged in the ECR etching process and to improve device performance.We find...

Full description

Bibliographic Details
Main Authors: Yu_Ren Liu, 劉育任
Other Authors: Ching_Ting Lee
Format: Others
Language:zh-TW
Published: 1999
Online Access:http://ndltd.ncl.edu.tw/handle/50094743205148948067
id ndltd-TW-087NCU00614036
record_format oai_dc
spelling ndltd-TW-087NCU006140362016-07-11T04:13:53Z http://ndltd.ncl.edu.tw/handle/50094743205148948067 The fabrication and analysis of GaN light emitting diode 氮化鎵發光二極體製作與分析 Yu_Ren Liu 劉育任 碩士 國立中央大學 光電科學研究所 87 In this paper, we fabricate GaN LED by using ECR etching technology.And after ECR etching process, we use RTA (Rapid thermal annealing) to recover the lattice quality which is damaged in the ECR etching process and to improve device performance.We find that by using RTA technique , reverse leakage current of LED device can be decreased. Besides RTA technique, we also try chemical solution treatment technique to do research on decreasing damage caused by ECR etching Ching_Ting Lee 李清庭 1999 學位論文 ; thesis 48 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立中央大學 === 光電科學研究所 === 87 === In this paper, we fabricate GaN LED by using ECR etching technology.And after ECR etching process, we use RTA (Rapid thermal annealing) to recover the lattice quality which is damaged in the ECR etching process and to improve device performance.We find that by using RTA technique , reverse leakage current of LED device can be decreased. Besides RTA technique, we also try chemical solution treatment technique to do research on decreasing damage caused by ECR etching
author2 Ching_Ting Lee
author_facet Ching_Ting Lee
Yu_Ren Liu
劉育任
author Yu_Ren Liu
劉育任
spellingShingle Yu_Ren Liu
劉育任
The fabrication and analysis of GaN light emitting diode
author_sort Yu_Ren Liu
title The fabrication and analysis of GaN light emitting diode
title_short The fabrication and analysis of GaN light emitting diode
title_full The fabrication and analysis of GaN light emitting diode
title_fullStr The fabrication and analysis of GaN light emitting diode
title_full_unstemmed The fabrication and analysis of GaN light emitting diode
title_sort fabrication and analysis of gan light emitting diode
publishDate 1999
url http://ndltd.ncl.edu.tw/handle/50094743205148948067
work_keys_str_mv AT yurenliu thefabricationandanalysisofganlightemittingdiode
AT liúyùrèn thefabricationandanalysisofganlightemittingdiode
AT yurenliu dànhuàjiāfāguāngèrjítǐzhìzuòyǔfēnxī
AT liúyùrèn dànhuàjiāfāguāngèrjítǐzhìzuòyǔfēnxī
AT yurenliu fabricationandanalysisofganlightemittingdiode
AT liúyùrèn fabricationandanalysisofganlightemittingdiode
_version_ 1718344321531379712

Similar Items