Characteristics of MSM Photodetector with Amorphous Heterojunction and Recessed ITO electrode
碩士 === 國立中央大學 === 電機工程研究所 === 87 === Abstract In this study, the metal-semiconductor-metal photodetectors (MSM-PD's) with a hydrogenated amorphous silicon (a-Si:H) film deposited on 〔100〕 silicon wafer have been studied. Two kinds of MSM-PD device, one had the recessed Cr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96807078514421154884 |