Micromotor Design and Fabrication
碩士 === 國立交通大學 === 機械工程系 === 87 === This thesis focuses on the design and fabrication of micromotors. By using the surface micromachining technique, we designed and fabricated an electrostatic side-drive wobble micromotor based on Deng's geometric design.. Moreover, we also made imp...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10157716736304525471 |