The special process of bolometer using titanium as the metal film
碩士 === 國立交通大學 === 電子物理系 === 87 === This research is using titanium of CMOS process as a thermister.The aim of research is to search high TCR and process compatible with CMOS process.We try two process;one is rapid thermal annealing in nitrogenous after Titanium deposited in high vaccum sy...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84296076731797660413 |