Numerical Simulation and Characterization of SILC in Oxides

碩士 === 國立交通大學 === 電子工程系 === 87 === The mechanisms and transient characteristics of edge FN and uniform FN stress induced leakage current (SILC) in tunnel oxides are investigated. A correlation between stress induced gate current and substrate current in a n-MOSFET is observed. A numercal...

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Bibliographic Details
Main Authors: Yeh, Chih-Chieh, 葉致鍇
Other Authors: Wang, Tahui
Format: Others
Language:zh-TW
Published: 1999
Online Access:http://ndltd.ncl.edu.tw/handle/31163048883823884984