Preparation of magnetron sputtered dysprosium oxide and strontium bismuth niobium tantalate thin films and their properties
博士 === 國立交通大學 === 材料科學與工程系 === 87 === Magnetron sputtering technique is employed to prepare dysprosium oxide thin films on Si(111) substrates and strontium bismuth niobium tantalate(SBTN) thin films on Pt/ SiO2 /Si(100) substrates. The effect of oxygen to argon mixing ratio on the properties of dysp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78286127268160056485 |