Electrical properties and crystal structure of (Ba,Sr)TiO3 films on metallic oxide bottom electrodes
博士 === 國立交通大學 === 材料科學與工程系 === 87 === There are three part of discussions were included in this study. In chapter 2, (Ba,Sr)TiO3 (BST) films on Pt electrode were fabricated with different Ba/Sr ratio BST ceramic as targets by radio-frequency (rf) magnetron sputtering at various substrate temperature...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1999
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Online Access: | http://ndltd.ncl.edu.tw/handle/99970414616009268052 |