The Construction of Modularized Machine Interface and Emulator for a Wafer Fab

碩士 === 國立交通大學 === 工業工程與管理系 === 87 === Under the fast growth and highly competitiveness situation of semiconductor industry, how to optimize the manufacturing environment is a very important issue. One of the key issues is about the utilization and management of the manufacturing equipment...

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Bibliographic Details
Main Authors: Cheng-Eou Wu, 吳成堯
Other Authors: Der-Baau Perng
Format: Others
Language:zh-TW
Published: 1999
Online Access:http://ndltd.ncl.edu.tw/handle/41376817413044389088