The Construction of Modularized Machine Interface and Emulator for a Wafer Fab
碩士 === 國立交通大學 === 工業工程與管理系 === 87 === Under the fast growth and highly competitiveness situation of semiconductor industry, how to optimize the manufacturing environment is a very important issue. One of the key issues is about the utilization and management of the manufacturing equipment...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1999
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Online Access: | http://ndltd.ncl.edu.tw/handle/41376817413044389088 |