A Study of Air Gap Low-k Structures for ULSI Multi-level Interconnection
碩士 === 國立成功大學 === 電機工程學系 === 87 === The major purpose of this thesis is to design several air gap low k structures to reduce the dielectric constant for advance ULSI application. Use the TMA Raphael to simulate the effective dielectric constant of the structures, and making the experiment...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23237252695689559919 |