Atomic Layer Epitaxy of AlGaN
碩士 === 逢甲大學 === 材料科學學系 === 87 === The purpose of this study is to explore the effect of the growth conditions and substrate orientations on the crystal structure, crystallinity and optical properties of the AlGaN films. AlGaN films were grown on (0001) and (11-20 ) sapphire substrates by atomic laye...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48721060772478035277 |