Silicon-Containing Positive Photoresist for DUV Lithography
碩士 === 中原大學 === 化學系 === 87 === The hydrophilicity of the ladder-type alkali insoluble polysilsesquioxane(PolyT4) is modified, in this study, through hydroxylation and acetylation to produce OH-PolyT4 and AC-PolyT4, respectively. It is found that AC-PolyT4 is not only alkali soluble but al...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42855370834703935465 |