Excimer Laser Micro-machining of Polymer and Semiconductor Materials
碩士 === 中正理工學院 === 兵器系統工程研究所 === 87 === ABSTRACT Owing to their high energy density and efficiency, CO2 and Nd-YAG laser are widely used for surface treating and cutting of materials. However, unwanted flow of molten materials due to thermal energy and poor surface and edge quality are nor...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90711112572787371377 |