Investigation of Silicon Micro Joining Structure
碩士 === 淡江大學 === 機械工程學系 === 86 === Duo to the mature of semiconductor process technology, the study on the MEMS "Micro Electro Mechanical System" is will developing. Micro joining structures can be applied to bio-engineering, aerospace - engineering and medical engineering. In the pape...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60977587362623446029 |