The Design and Fabrication of Dispersive Soft X-ray High Resolution Detector Array
碩士 === 國立臺灣科技大學 === 電子工程技術研究所 === 86 === The purpose of this work is to produce a photo-detector diode array with PIN structure which has coupling capacitors and bias resistors and its density is up to 512 pixels on a 5cm*1cm silicon wafer to detect dispersive soft X-ray. In order to redu...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1998
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Online Access: | http://ndltd.ncl.edu.tw/handle/58286506258678188665 |