The Design and Fabrication of Dispersive Soft X-ray High Resolution Detector Array

碩士 === 國立臺灣科技大學 === 電子工程技術研究所 === 86 === The purpose of this work is to produce a photo-detector diode array with PIN structure which has coupling capacitors and bias resistors and its density is up to 512 pixels on a 5cm*1cm silicon wafer to detect dispersive soft X-ray. In order to redu...

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Bibliographic Details
Main Authors: Chang Wen-Rong, 張文榮
Other Authors: Sun Cherng-Yuan
Format: Others
Language:zh-TW
Published: 1998
Online Access:http://ndltd.ncl.edu.tw/handle/58286506258678188665