Grow the SiNx thin film by pulsed laser deposition and study the characteristic of phase-shifting mask by this SiNx thin film
碩士 === 國立臺灣大學 === 物理學系 === 86 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85511598417447059705 |