| Summary: | 碩士 === 國立臺灣大學 === 工業工程學研究所 === 86 === An object-oriented simulation system is developed in this research
for automated material handling system analysis in IC wafer fabs.
The system structure of the simulation system is composed of a generic
simulator module and an IC fab application module. Both of them are
developed by rigorous system analysis, design, and implementation,
using object-oriented techniques. The simulation system is implemented
in C++ programming language on IBM compatible PCs. Derived from the
application module, two different transport models are constructed:
one is the traditional model consisting of a mono-rail vehicles and
automated guided vehicles, the other is the highly automated over-head
transportation system for 300mm wafer processing. These two models are
subjected to simulation of intrabay and interbay transportation.
Different numbers of vehicles are simulated for efficiency analysis.
Two different dispatching rules of the stocker and the AGV are exercised
to evaluate the efficiency of material handling systems. Based on the
obtained information, suggestions of selecting the better transport
model are presented.
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