An Object-Oriented Simulator for Automated Material Handling Systems of Wafer Fabs
碩士 === 國立臺灣大學 === 工業工程學研究所 === 86 === An object-oriented simulation system is developed in this research for automated material handling system analysis in IC wafer fabs. The system structure of the simulation system is composed of a generic simulator mod...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34517533949856257842 |