The Characterization of Electrochemical Silicon Etching with a PN Junction and its Application to Fabricate Ultrasonic Micromotor

The Characterization of Electrochemical Silicon Etching with a PN Junction and its Application to Fabricate Ultrasonic Micromotor

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碩士 === 國立海洋大學 === 電機工程研究所 === 86 ===

Bibliographic Details
Main Authors:	Xu, Chun-Yuan, 許淳淵
Other Authors:	Zhang, Zhong-Cheng
Format:	Others
Language:	zh-TW
Published:	1998
Online Access:	http://ndltd.ncl.edu.tw/handle/75558080133335541525

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