The Characterization of Electrochemical Silicon Etching with a PN Junction and its Application to Fabricate Ultrasonic Micromotor
碩士 === 國立海洋大學 === 電機工程研究所 === 86 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75558080133335541525 |