The Characterization of Electrochemical Silicon Etching with a PN Junction and its Application to Fabricate Ultrasonic Micromotor

The Characterization of Electrochemical Silicon Etching with a PN Junction and its Application to Fabricate Ultrasonic Micromotor

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碩士 === 國立海洋大學 === 電機工程研究所 === 86 ===

Bibliographic Details
Main Authors: Xu, Chun-Yuan, 許淳淵
Other Authors: Zhang, Zhong-Cheng
Format: Others
Language:zh-TW
Published: 1998
Online Access:http://ndltd.ncl.edu.tw/handle/75558080133335541525
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spelling ndltd-TW-086NTOU44420022016-06-29T04:13:35Z http://ndltd.ncl.edu.tw/handle/75558080133335541525 The Characterization of Electrochemical Silicon Etching with a PN Junction and its Application to Fabricate Ultrasonic Micromotor 電化學矽蝕刻於PN接面之特性分析及其在超音波微馬達製程之應用 Xu, Chun-Yuan 許淳淵 碩士 國立海洋大學 電機工程研究所 86 Zhang, Zhong-Cheng 張忠誠 1998 學位論文 ; thesis 95 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立海洋大學 === 電機工程研究所 === 86 ===
author2 Zhang, Zhong-Cheng
author_facet Zhang, Zhong-Cheng
Xu, Chun-Yuan
許淳淵
author Xu, Chun-Yuan
許淳淵
spellingShingle Xu, Chun-Yuan
許淳淵
The Characterization of Electrochemical Silicon Etching with a PN Junction and its Application to Fabricate Ultrasonic Micromotor
author_sort Xu, Chun-Yuan
title The Characterization of Electrochemical Silicon Etching with a PN Junction and its Application to Fabricate Ultrasonic Micromotor
title_short The Characterization of Electrochemical Silicon Etching with a PN Junction and its Application to Fabricate Ultrasonic Micromotor
title_full The Characterization of Electrochemical Silicon Etching with a PN Junction and its Application to Fabricate Ultrasonic Micromotor
title_fullStr The Characterization of Electrochemical Silicon Etching with a PN Junction and its Application to Fabricate Ultrasonic Micromotor
title_full_unstemmed The Characterization of Electrochemical Silicon Etching with a PN Junction and its Application to Fabricate Ultrasonic Micromotor
title_sort characterization of electrochemical silicon etching with a pn junction and its application to fabricate ultrasonic micromotor
publishDate 1998
url http://ndltd.ncl.edu.tw/handle/75558080133335541525
work_keys_str_mv AT xuchunyuan thecharacterizationofelectrochemicalsiliconetchingwithapnjunctionanditsapplicationtofabricateultrasonicmicromotor
AT xǔchúnyuān thecharacterizationofelectrochemicalsiliconetchingwithapnjunctionanditsapplicationtofabricateultrasonicmicromotor
AT xuchunyuan diànhuàxuéxìshíkèyúpnjiēmiànzhītèxìngfēnxījíqízàichāoyīnbōwēimǎdázhìchéngzhīyīngyòng
AT xǔchúnyuān diànhuàxuéxìshíkèyúpnjiēmiànzhītèxìngfēnxījíqízàichāoyīnbōwēimǎdázhìchéngzhīyīngyòng
AT xuchunyuan characterizationofelectrochemicalsiliconetchingwithapnjunctionanditsapplicationtofabricateultrasonicmicromotor
AT xǔchúnyuān characterizationofelectrochemicalsiliconetchingwithapnjunctionanditsapplicationtofabricateultrasonicmicromotor
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