= Study in subnanometer laser metrology and subnanometer real-time motion control
博士 === 國立清華大學 === 物理研究所 === 86 ===
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32300929663846703717 |