Research On The Amorphous Carbon Nitride Films Synthesized By ECR-CVD System
碩士 === 國立清華大學 === 材料科學工程研究所 === 86 === The purpose of this thesis is to study the amorphous carbon nitride films synthesized on Si substrate by using ECR - CVD system with various microwave powers, negative dc - bias and flow rate ratio of N2 - / C2H2. Plasma chemistry was investigated by OES sys...
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| Format: | Others |
| Language: | en_US |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14518673752004886745 |