A Study on Outgassing Behavior of Spin-on Glass(SOG) Modified by Ion Implantation
博士 === 國立清華大學 === 材料科學與工程學系 === 86 === The difficulty in the use of spin-on-glass (SOG) for multilevel interconnections leads to the requirement of higher-temperature (800~850℃) curing of the material, since the low-temperature annealed SOG may result in a significant amount of moisture during subse...
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| Format: | Others |
| Language: | en_US |
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1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37561517921781565002 |