A Simple Micro - solenoid Type Inductor for Integrated Circuits
碩士 === 國立中山大學 === 光電工程學研究所 === 86 === The objective of this work is to develop a simple processingtechnology to construct a solenoid type micro - inductor forVLSI integration. The resonant frequency of device is designedto operate at microwave range. Because the micro - inductor was fabri...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1998
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Online Access: | http://ndltd.ncl.edu.tw/handle/76001952909498466690 |