Measurement of the Optical Constants of Platinum Films by Multiple Wavelength and Multiple Incident Angle Techniques
碩士 === 國立交通大學 === 光電工程研究所 === 86 === A PSA ellipsometer is used to measure the ellipsometric parameters (ψ and △) of Platinum films. Using the ψ-△ curve and zoom-in technique, we determined the film thickness and their complex refractive indices by different incident anges.ln result, we find that...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55347830924531307269 |