The Construction of Dispatching Rule for Control Wafer in Diffusion Area
碩士 === 國立交通大學 === 工業工程與管理學系 === 86 === Semiconductor manufacturing is the most competitive industry in our country now. It is difficult to manage the wafer production procedures because of the complexities of the corresponding manufacturing processes and machines Most past research papers emphasiz...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1998
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Online Access: | http://ndltd.ncl.edu.tw/handle/75757473675966206276 |