The Real Time Monitor and Controller of a Cu_CVD System(II)
碩士 === 國立交通大學 === 電機與控制工程學系 === 86 === A real time remote control system for Cu_CVD system is proposed here. This system has both the monitor and control functions so that the users can supervise a Cu_CVD system through the network. In th...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/13078274358117844918 |