The Research and Simulation of Diffusion and Photolithography
碩士 === 國立暨南國際大學 === 資訊管理學系 === 86 === In Taiwan , The history of semiconductor industry is about twenty years. From the 256K DRAM in the past to the 64M DRAM now , all the constraints about the manufacturing procedure are in the photolithograp...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1998
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Online Access: | http://ndltd.ncl.edu.tw/handle/56374589320037168336 |