The Research and Simulation of Diffusion and Photolithography

碩士 === 國立暨南國際大學 === 資訊管理學系 === 86 === In Taiwan , The history of semiconductor industry is about twenty years. From the 256K DRAM in the past to the 64M DRAM now , all the constraints about the manufacturing procedure are in the photolithograp...

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Bibliographic Details
Main Authors: Hsu, Eric, 許進政
Other Authors: Chuang Lea Yea
Format: Others
Language:zh-TW
Published: 1998
Online Access:http://ndltd.ncl.edu.tw/handle/56374589320037168336