Considerations of Scanning Probe Microscope Applications to Surface Inspection and Elastic Behavior Evaluation of Micro Cantilever

Considerations of Scanning Probe Microscope Applications to Surface Inspection and Elastic Behavior Evaluation of Micro Cantilever

碩士 === 國立成功大學 === 製造工程研究所 === 86 === Recently, the research of Micro Electro Mechanical Systems (MEMS) has been increasingly

Bibliographic Details
Main Authors: Wang, Kai-Hau, 汪凱皓
Other Authors: Ching-Cheng Wang
Format: Others
Language:zh-TW
Published: 1998
Online Access:http://ndltd.ncl.edu.tw/handle/52709733167083673892
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spelling ndltd-TW-086NCKU11680022015-10-13T11:06:12Z http://ndltd.ncl.edu.tw/handle/52709733167083673892 Considerations of Scanning Probe Microscope Applications to Surface Inspection and Elastic Behavior Evaluation of Micro Cantilever 應用掃描探針顯微儀檢測微懸臂樑表面形狀評估其彈性行為之方法研究 Wang, Kai-Hau 汪凱皓 碩士 國立成功大學 製造工程研究所 86 Recently, the research of Micro Electro Mechanical Systems (MEMS) has been increasingly Ching-Cheng Wang 王清正 1998 學位論文 ; thesis 192 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立成功大學 === 製造工程研究所 === 86 === Recently, the research of Micro Electro Mechanical Systems (MEMS) has been increasingly
author2 Ching-Cheng Wang
author_facet Ching-Cheng Wang
Wang, Kai-Hau
汪凱皓
author Wang, Kai-Hau
汪凱皓
spellingShingle Wang, Kai-Hau
汪凱皓
Considerations of Scanning Probe Microscope Applications to Surface Inspection and Elastic Behavior Evaluation of Micro Cantilever
author_sort Wang, Kai-Hau
title Considerations of Scanning Probe Microscope Applications to Surface Inspection and Elastic Behavior Evaluation of Micro Cantilever
title_short Considerations of Scanning Probe Microscope Applications to Surface Inspection and Elastic Behavior Evaluation of Micro Cantilever
title_full Considerations of Scanning Probe Microscope Applications to Surface Inspection and Elastic Behavior Evaluation of Micro Cantilever
title_fullStr Considerations of Scanning Probe Microscope Applications to Surface Inspection and Elastic Behavior Evaluation of Micro Cantilever
title_full_unstemmed Considerations of Scanning Probe Microscope Applications to Surface Inspection and Elastic Behavior Evaluation of Micro Cantilever
title_sort considerations of scanning probe microscope applications to surface inspection and elastic behavior evaluation of micro cantilever
publishDate 1998
url http://ndltd.ncl.edu.tw/handle/52709733167083673892
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