Considerations of Scanning Probe Microscope Applications to Surface Inspection and Elastic Behavior Evaluation of Micro Cantilever
碩士 === 國立成功大學 === 製造工程研究所 === 86 === Recently, the research of Micro Electro Mechanical Systems (MEMS) has been increasingly
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52709733167083673892 |