Study on the Performance of (Zygo)ZMI-1000
碩士 === 國立中興大學 === 機械工程學系 === 86 === Due to Heterodyne Interferometr featuring reslution easily, Handlingimmediaely and accuratly,etc,the thesis is going to exert it in theMicropositioning System to track position by a piezoelectric actuator...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32400259995249582782 |