The Control of the Oxygen Precipitates and Related Micro-defects in Cz Silicon with Low-High Two Step Annealing
碩士 === 國立中興大學 === 材料工程學研究所 === 86 === Two-step and three-step anneals were applied systematically to a set of commer cial Cz silicon wafers. The micro-defects generated during the anneals were decorated with Wright solution and in...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90990863132272613114 |