An Expert System of Maintenance in Semiconductor Manufacturing

• Main Authors: Meng-Hua Li, 李孟樺
• Other Authors: Shun-Sheng Wang
• Format: Others
• Language: zh-TW
• Published: 1998
• Online Access: http://ndltd.ncl.edu.tw/handle/58790816260489556868

碩士 === 朝陽大學 === 工業工程與管理研究所 === 86 === Semiconductor manufacturing requires high precision equipment and intensive technology. The cost of the expensive and assorted equipment is more than 50% of all production cost (the proportion is more than 70% for 8-inch fabs). Besides, the conditions of machines will directly affect the capacity, quality, and yield. Thus, the maintenance of equipment is very important in the semiconductor manufacturing. Although the equipment vendors usually provide maintenance manual, experienced experts are required for the maintenance work. However, due to fast development of technology in semiconductor manufacturing, experts’ or engineers’ experiences and knowledge are not easy to be conveyed. Hence, this research is to develop an equipment maintenance expert system for the semiconductor manufacturing industry. In this thesis, a conceptual structure of the maintenance expert system is constructed first. Followed is the development of knowledge acquisition interface module of this expert system by using object-oriented method. The objective of developing this module is to provide user a simple and easy way to classify the maintenance knowledge efficiently and systematically. Finally, a practical example is presented to show the construction of the knowledge acquisition interface by using EXSYS software.