An Expert System of Maintenance in Semiconductor Manufacturing
碩士 === 朝陽大學 === 工業工程與管理研究所 === 86 === Semiconductor manufacturing requires high precision equipment and intensive technology. The cost of the expensive and assorted equipment is more than 50% of all production cost (the proportion is more than 70% for 8-i...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58790816260489556868 |