Modeling and Control of a Capacitative Semiconductor Accelerometer

• Main Author: 王鑫得
• Other Authors: 陳世樂
• Format: Others
• Language: zh-TW
• Published: 1998
• Online Access: http://ndltd.ncl.edu.tw/handle/75014550477928035760

碩士 === 國立中正大學 === 機械工程研究所 === 86 === 　　This thesis studies the dynamics and performance of a capacitative micro - accelerometer with PD control under three different signal processing methods, namely modulation - demodulation method, pulse Whdth Modulation (PWM) method and Phase Locked Loops (PLL) method. Based on the performance requirements of the accelerometer system, we obtain a set of beeter - tuned PD control parameter for each signal processing method by numerical simulations. Finally, the advantages and disadvantages for the present system of the three signal processing approaches are discussed throgh the analysis of system''s time responses, bode plots, the input output relationships, and noise rejection ability. An optimal signal signal processing control structure is then proposed for our micro - accelerometer.