Modeling and Control of a Capacitative Semiconductor Accelerometer
碩士 === 國立中正大學 === 機械工程研究所 === 86 === This thesis studies the dynamics and performance of a capacitative micro - accelerometer with PD control under three different signal processing methods, namely modulation - demodulation method, pulse Whdth Modulation (PWM) method and Phase Locked Loops (PLL) m...
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| Format: | Others |
| Language: | zh-TW |
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1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75014550477928035760 |