he Study of Low Temperature DC PECVD Films Containing Silicon Oxide
碩士 === 大同工學院 === 材料工程學系 === 85 ===
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74285048246619741266 |