Density Functional Theory Study of Formation of TiSi2 Film
碩士 === 淡江大學 === 化學學系 === 85 === The interest in titanium disilicide is base on two important properties of these material: (1)Their electrical resistivity generally exhibits a metallic behaviour. (2)They exhibit good high-temperature stability and oxidation resistance. Recently, chemical va...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02327701167537085470 |