Long-term Evaluation of Flows in Integrated Circuit Fabrication

碩士 === 東海大學 === 數學系 === 85 === This thesis presents programs written to carry out the simulation of flows in certain experimental integrated circuit fabrication. We do hope this will further exploit the possibility of the long-term evaluation of the...

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Main Authors:	Li, Liang-feng, 李良峰
Other Authors:	Yu-xian Tsai, Wan-chen Hsieh, Li Liu
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/30904108151614481770

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spelling	ndltd-TW-085THU004790092016-07-01T04:15:56Z http://ndltd.ncl.edu.tw/handle/30904108151614481770 Long-term Evaluation of Flows in Integrated Circuit Fabrication 積體電路製造流程之長期評估 Li, Liang-feng 李良峰碩士東海大學數學系 85 This thesis presents programs written to carry out the simulation of flows in certain experimental integrated circuit fabrication. We do hope this will further exploit the possibility of the long-term evaluation of the flows in the IC fabrications. Yu-xian Tsai, Wan-chen Hsieh, Li Liu 蔡裕賢, 解萬臣, 劉力 1996 學位論文 ; thesis 46 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 東海大學 === 數學系 === 85 === This thesis presents programs written to carry out the simulation of flows in certain experimental integrated circuit fabrication. We do hope this will further exploit the possibility of the long-term evaluation of the flows in the IC fabrications.
author2	Yu-xian Tsai, Wan-chen Hsieh, Li Liu
author_facet	Yu-xian Tsai, Wan-chen Hsieh, Li Liu Li, Liang-feng 李良峰
author	Li, Liang-feng 李良峰
spellingShingle	Li, Liang-feng 李良峰 Long-term Evaluation of Flows in Integrated Circuit Fabrication
author_sort	Li, Liang-feng
title	Long-term Evaluation of Flows in Integrated Circuit Fabrication
title_short	Long-term Evaluation of Flows in Integrated Circuit Fabrication
title_full	Long-term Evaluation of Flows in Integrated Circuit Fabrication
title_fullStr	Long-term Evaluation of Flows in Integrated Circuit Fabrication
title_full_unstemmed	Long-term Evaluation of Flows in Integrated Circuit Fabrication
title_sort	long-term evaluation of flows in integrated circuit fabrication
publishDate	1996
url	http://ndltd.ncl.edu.tw/handle/30904108151614481770
work_keys_str_mv	AT liliangfeng longtermevaluationofflowsinintegratedcircuitfabrication AT lǐliángfēng longtermevaluationofflowsinintegratedcircuitfabrication AT liliangfeng jītǐdiànlùzhìzàoliúchéngzhīzhǎngqīpínggū AT lǐliángfēng jītǐdiànlùzhìzàoliúchéngzhīzhǎngqīpínggū
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Long-term Evaluation of Flows in Integrated Circuit Fabrication

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