Long-term Evaluation of Flows in Integrated Circuit Fabrication
碩士 === 東海大學 === 數學系 === 85 === This thesis presents programs written to carry out the simulation of flows in certain experimental integrated circuit fabrication. We do hope this will further exploit the possibility of the long-term evaluation of the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30904108151614481770 |