Monitoring and Error Management for Material Movement in Semiconductor Manufacturing Factory
碩士 === 國立台灣工業技術學院 === 電機工程技術研究所 === 85 === On this thesis, two kinds of movement methods are used to simulate the movement of AGV(Automated Guided Vehicles) in interbay of the third factory of U.M.C., and the other is developed to improve the faults of ma...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/78061051697125585476 |