The Study of TiN, (Ti,Al)N coatings prepared by Un-balanced Magnetron Sputtering
碩士 === 國立臺灣大學 === 材料科學工程研究所 === 85 ===
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/93764567285693734717 |